@Article{MiglioriniAleBalLanFer:2014:DoDiEl,
author = "Migliorini, Fernanda Lanzoni and Alegre, Marcela Dalprat and
Baldan, Maur{\'{\i}}cio Ribeiro and Lanza, Marcos Roberto
Vasconcelos and Ferreira, Neidenei Gomes",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Universidade de S{\~a}o Paulo
(USP)} and {Instituto Nacional de Pesquisas Espaciais (INPE)}",
title = "Doped diamond electrodes on titanium substrates with controlled
sp2/sp3 hybridization at different boron levels",
journal = "Thin Solid Films",
year = "2014",
volume = "564",
pages = "97--103",
keywords = "titanium, diamond, chemical vapor deposition.",
abstract = "Doped diamond films on titanium substrate were systematically
studied by controlling their sp2/sp3 hybridization as well as
their boron doping levels. Samples were grown by hot filament
chemical vapor deposition technique at CH4 additions of 1, 2, 6
and 10 sccmdiluted in H2 for a total flowrate of 200 sccm. For
each CH4 concentration four doping levelswere studied. The boron
sourcewas obtained froma constant flowof 40 sccmfor an additional
H2 line passing through a bubbler containing the B2O3 dissolved in
methanol with B/C ratios of 2000, 7000, 15,000, and 30,000 B/C
ppm. Scanning electron microscopy images depicted well faceted
films without cracks or delaminations. The sp2/sp3 ratio as purity
index (PI) and the growth tendency index (GTI), associated to the
TiC formation, were evaluated by Raman and X-ray spectra,
respectively. GTI index was used in this work to analyze the
competition between the diamond growth and TiC formation. It is
also possible to associate the GTI index in terms of C/H ratio,
sincewhen this ratio is increased, the GTI index also increased. A
constant GTI increase was observed as a function of CH4 addition
for the whole range of the boron doping studied. For PI, an
optimized value was observed at 6 sccm of CH4 for the doping
levels higher than 2000 ppm of B/C ratio.",
doi = "10.1016/j.tsf.2014.05.037",
url = "http://dx.doi.org/10.1016/j.tsf.2014.05.037",
issn = "0040-6090",
label = "self-archiving-INPE-MCTI-GOV-BR",
language = "en",
urlaccessdate = "27 abr. 2024"
}